More Microelectronics Events
Join us at a location near you to meet our experts and product specialists, and learn out how the latest technical innovations can improve both the efficiency and quality of your processes at all scales.
February 2024
SPIE. ADVANCED LITHOGRAPHY + PATTERNING

San Jose Convention Center, San Jose

Our scientists will present papers:

 

Filter start-up study on HDPE membrane  point-of-use filter for lithography application

By Toru Umeda

https://spie.org/advanced-lithography/presentation/Filter-start-up-study-on-HDPE-membrane-point-of-use/12957-82#_=

 

Filtration study with Nylon membrane  for metal removal performance improvement

By Hirokazu Sakakibara

https://spie.org/advanced-lithography/presentation/Filtration-study-with-Nylon-membrane-for-metal-removal-performance-improvement/12957-109#_=_